| | Tokyo Electron Ltd | Semiconductor Equipment & Materials | Technology | -10.07 | 8.03 | 23.19 | 37.68 | 76.08 | 133.48 | 66.18 | 170.47 |
| | Tokyo Electron Ltd ADR | Semiconductor Equipment & Materials | Technology | -10.74 | 5.54 | 12.20 | 37.25 | 67.66 | 120.78 | 60.34 | 159.32 |
| | Rubicon Technology Inc | Semiconductor Equipment & Materials | Technology | -1.75 | 3.61 | 42.46 | 75.88 | 103.52 | 196.64 | 680.62 | 1,125.48 |
| | Disco Corp ADR | Semiconductor Equipment & Materials | Technology | -6.44 | 2.31 | -12.38 | -5.82 | 41.69 | 88.38 | 10.93 | 183.00 |
| | REC Silicon ASA | Semiconductor Equipment & Materials | Technology | 0.00 | 0.00 | 100.00 | -50.00 | -75.00 | -89.47 | -97.73 | -98.62 |
| | Advantest Corp | Semiconductor Equipment & Materials | Technology | 0.00 | 0.00 | -11.54 | 1.22 | 33.60 | 198.94 | 382.26 | 350.84 |
| | ASML Holding N.V. | Semiconductor Equipment & Materials | Technology | -7.54 | -0.16 | 11.86 | 18.96 | 48.48 | 119.32 | 58.43 | 130.46 |
| | Lasertec Corp ADR | Semiconductor Equipment & Materials | Technology | -5.75 | -0.58 | -11.01 | 21.48 | 19.72 | 146.77 | 6.82 | 64.38 |
| | Sumco Corp ADR | Semiconductor Equipment & Materials | Technology | -10.93 | -1.32 | 46.12 | 122.46 | 182.08 | 253.16 | 65.59 | 67.40 |
| | Sumco Corp | Semiconductor Equipment & Materials | Technology | -9.22 | -2.18 | 57.49 | 127.09 | 198.33 | 287.98 | 71.75 | 71.05 |
| | Suss Microtec SE | Semiconductor Equipment & Materials | Technology | 0.00 | -2.96 | 8.70 | 57.23 | 125.73 | 132.29 | 54.56 | 139.92 |
| | SCI Engineered Materials Inc | Semiconductor Equipment & Materials | Technology | -1.84 | -3.42 | -11.17 | 56.32 | 55.15 | 84.20 | 46.32 | 91.48 |
| | Solitron Devices Inc | Semiconductor Equipment & Materials | Technology | 4.55 | -5.12 | -3.48 | -11.54 | 12.20 | 50.82 | 27.78 | 121.15 |
| | ASM International N.V. | Semiconductor Equipment & Materials | Technology | -2.13 | -5.99 | -4.60 | 17.18 | 60.50 | 76.58 | 39.16 | 126.26 |
| | ASM International N.V. | Semiconductor Equipment & Materials | Technology | -5.62 | -6.14 | -0.82 | 17.63 | 62.99 | 74.78 | 32.42 | 135.16 |
| | Advantest Corp ADR | Semiconductor Equipment & Materials | Technology | -13.27 | -7.04 | -17.48 | -3.12 | 17.24 | 185.39 | 340.24 | 369.27 |
| | Lasertec Corp | Semiconductor Equipment & Materials | Technology | 0.00 | -7.62 | -12.66 | 13.27 | 27.60 | 145.25 | 3.61 | 53.87 |
| | BE Semiconductor Industries N.V. ADR | Semiconductor Equipment & Materials | Technology | -8.26 | -8.06 | 2.00 | 40.00 | 88.94 | 142.71 | 104.79 | 185.02 |
| | IQE Plc | Semiconductor Equipment & Materials | Technology | -10.77 | -8.66 | -12.95 | 96.61 | 767.61 | 321.97 | 48.49 | 123.08 |
| | ASMLtd ADR | Semiconductor Equipment & Materials | Technology | -6.08 | -11.72 | 4.50 | 53.67 | 118.25 | 212.18 | 75.50 | 140.42 |
| | Aixtron SE ADR | Semiconductor Equipment & Materials | Technology | -10.99 | -14.01 | 3.21 | 81.72 | 196.32 | 272.04 | 145.50 | 80.05 |
| | Aixtron SE | Semiconductor Equipment & Materials | Technology | -11.85 | -14.18 | -4.50 | 74.30 | 175.03 | 303.06 | 139.70 | 86.54 |
| | Soitec S.A. | Semiconductor Equipment & Materials | Technology | -12.94 | -22.64 | -13.86 | 232.72 | 397.98 | 178.33 | 28.81 | 8.04 |
| | Nanoco Group Plc | Semiconductor Equipment & Materials | Technology | -2.25 | -44.00 | 8.78 | -35.60 | -54.00 | -83.35 | -85.36 | -85.36 |